- Description
-
Details
The PEIRS Sputtering 120 kW power supply is a high-power voltage conversion device used for thin film deposition by sputtering. Sputtering technology allows for the deposition of ultra-thin layers of various materials, such as metals, insulators, and semiconductors. The PEIRS 120 kW power supply features the following: Output power: 120 kW Input voltage: 480 VAC, 3-phase Output voltage: 0-1200 VDC Output current: 0-1000 ADC Power factor: 0.97 Overall dimensions: 1220 mm x 850 mm x 2300mm (height). Weight: 1100 kg. Protection features: short circuit, overload, overvoltage Modular design, allowing for easy maintenance and flexible expansion. This power supply operates reliably and efficiently with high-power ion sources used in the sputtering process and large-area target substrates.
Do You Have Any Questions?
318250 + 5 = enter the result ex:(3 + 2 = 5)
* required fields